HEX-S6.50.200 6-Axis Hexapod Tri-pod structer Parallel six degrees of freedom stages

Short Description:

Features:
High precision, can be assembled, can be customized, light aperture 460mm

Delivers consistent and reliable motion accuracy in a compact and rugged stage
It has ultra-fine positioning resolution and sufficient payload capability
Ideal for applications requiring complex multi-degree of freedom motion when available space is limited. It is suitable for the leveling of semiconductor test wafer.
Application scenario of optical inspection, large hollow aperture adjustment optical path.

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Product Detail

SPECIFICATION

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Specification	XY axis	θXθY axis	Z axis	θZ axis
Travel	±100mm	±3deg	±25mm	360deg
Motor type	stepper motor	stepper motor	stepper motor	direct drive motor
Grating resolution	4.88nm（1vpp）	4.88nm（1vpp）	4.88nm（1vpp）	0.04sec
Minimum step size	50nm	0.01ec	50nm	0.001sec
Repeatability Accuracy [um]	±0.5um	±0.5sec	±0.3um	±0.1sec
Accuracy [um]	±1um	±2sec	±1um	±3sec
Maximum speed	100mm/s	30deg/sec	15mm/s	4rps
Max load capacity [kg]	Horizontal load 300kg, vertical use load please contact the manufacturer
Weight	750kg