E-TRI Series E-TRI-VM-R1 Parallel Motion Stage

Short Description:

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

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Product Detail

Specification

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Specification	E-TRI-VM-R1
Z axis maximum travel	±3mm
Z axis resolution	4.88nm
Z axis repeatability	±0.1um
Position stability	±20nm
Max Speed	5mm/s
Max acceleration	2m/s
θX/θY maximum travel	±0.5°
θ-axis resolution	0.1sec
θ-axis repeatability	±1sec
Max Speed	25°/s
Max acceleration	100°/s^2
Counterweight balancing method	Pneumatic force balance (minimum air pressure 0.1MPa, maximum air pressure 0.6MPa)
Max load	25kg